Date of Award
Doctor of Philosophy (PhD)
Microfabrication (originally based on structuring the surface of silicon) remains the basic manufacturing technology of the semiconductor industry. The semiconductor business model has been driven by â€œMooreâ€™s Lawâ€ which predicts that the number of transistors the industry would be able to place on a computer chip would double every two years.
Baisie, Emmanuel Ayensu, "Modeling, Simulation, And Optimization Of Diamond Disc Pad Conditioning In Chemical Mechanical Polishing" (2012). Dissertations. 37.