Date of Award

2012

Document Type

Dissertation

Degree Name

Doctor of Philosophy (PhD)

First Advisor

Li, Zhichao

Abstract

Microfabrication (originally based on structuring the surface of silicon) remains the basic manufacturing technology of the semiconductor industry. The semiconductor business model has been driven by “Moore’s Law” which predicts that the number of transistors the industry would be able to place on a computer chip would double every two years.

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