Effects of Temperature on Ruthenium Oxide Thin Films using Pulsed Laser Deposition


Department of Mechanical Engineering

Document Type


Publication Date

Spring 2023


Within this report, experiments were conducted to determine what effects temperature has on thin film composition, crystalline orientation, and roughness. Ruthenium Oxide (RuO2) thin films were grown using pulsed laser deposition with different substrate temperatures (100, 200, 300). The properties of the thin films were observed using X-Ray diffraction, scanning electron microscopy, and atomic force microscopy measurements. It has been observed that the increase in temperature causes an increase in density, and roughness. The RuO2 thin films made at 500℃ are able to form on a substrate with strong crystalline orientation. This information can become vital in how thin films are made for their intended purpose.

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